| EDGE |
APEX |
VISTA |
CORE |
| Measurement uncertainty (X – Y axes) * |
5 + (6.5L/1000) μm ** |
5 + (9.54 L/1000) μm / 4 μm in FOV mode |
5 + (6.5L/1000) μm ** |
* Measurement uncertainty is determined in accordance with ISO-10360 Part 7
** L = length in mm, using controlled conditions with maximum magnification at the standard measuring plane